专利摘要:
1509808 Spectroscopic gas analyzer T TIRABASSI, O V ANTISARI, G CESARI, G GIOVANELLI and U BONAFE 2 July 1975 [4 July 1974] 27911/75 Heading G1A An instrument for measuring concentrations of pollutant gases independently of the effects of atmospheric scattering comprises a telescope 1, grating spectrometer 3, correlation mask 6, photomultiplier 10, a cell 4 containing a known concentration of the pollutant gas under examination, and electronic apparatus 9 for producing an output related to C the concentration of pollutant as given by:- Where R' and R" are the ratios of electrical signals corresponding to 1st and 2nd and 3rd and 4th sets of wavelength ranges of the dispersed light beam respectively when cell 4 is out of the light beam, R' and R" are corresponding ratios with the cell 4 interposed in the light beam, C, is the known concentration of gas in the cell of lenght L 1 and L is the distance from the light source. Mask 6 comprises a chromium plated quartz disc rotated at a constant speed by motor 7 and photoengraved with four concentric series of slits each series sampling one of the said wavelength ranges, the disc axis position relative to the spectrum and the spacing of the series of slits being such that one of the series samples a region of maximum intensity and another a region of minimum intensity of the spectrum, and each of the other two series are displaced towards the ultraviolet by the same amount, 2.4 Angstroms in the case of SO 2 , from the two regions. The disc also comprises photoengraved holes detected by optical detectors 12, 13 14 which send control signals to programmer 8, and device 15 regulating motor 7. Signals from the photomultiplier 10 pass via a pre-amplifier 16, and an analogic gate and digital to analogue converter 17, to a sequential network 18 which addresses signals corresponding to the four sets of wavelength ranges to respective digital accumulators 19-22. The accumulators discharge in pairs to ratio circuits 23, 24, which feed ratios R' and R" respectively to difference circuit 25. The value R'-R" is fed via switch 26 to a first store 27 and the programmer 8 instructs device 30 to locate the cell 4 in the light beam. A second sequence of measurements given the value R'-R" at the output of circuit 25 which value is fed to a second store 28 and the output of both stores is then discharged via discharger 29 to a ratio difference circuit 31. Circuit 31 produces the value of C in BCD form and feeds it to a numerical display 32.
公开号:SU953997A3
申请号:SU752150658
申请日:1975-07-04
公开日:1982-08-23
发明作者:Тирабасси Тициано;Витторио Антизари Оттавио;Чезари Джулио;Джованелли Джорджо;Бонафе Убальдо
申请人:Текнеко С.П.А. (Фирма);Консильо Национале Делле Ричерке (Фирма);
IPC主号:
专利说明:

(54) SPECIMATOR AND DEVICE FOR MEASURING POISON GAS CONCENTRATION CONCENTRATION The invention relates to an analytic technique for gas analysis and can be used to measure the concentration of small gas flux lines on long and short optical paths, in particular, to determine the concentration of small gas impurities on the atmosphere and atmosphere, for determining the concentration of small gas impurities on long and short optical paths, in order to determine the concentration of small gas impurities on the atmosphere and the distance of small gas impurities for determining the concentration of small gas impurities. devices for measuring the concentration of impurity gases in the atmosphere, based on measuring the absorption spectra for two wavelengths in the band and outside the absorption band of the test gas, respectively naturally lj. Their disadvantage is the relatively low accuracy associated with the effect of blocking the absorption bands of various substances and the presence of overlap due to light scattering by aerosol particles. The closest in technical essence to the present invention is a method for measuring the concentration of pollutant gases, including obtaining an optical absorption spectrum of a gas and measuring the ratio cyiviM of intensities in a given number of spectral regions of a given width coinciding with the minimum and maximum of the absorption spectrum, respectively, and a device for measuring the concentration contaminant gases, containing an optical radiation source, a spectrometer for decomposing the radiated emission through the test gas into a spectrum correlation mask in the output focal plane of the spectrometer with a slit for sampling the maxima and minima of the intensity of the spectrum at the first and second mask positions, respectively; behind the mask, a photodetector connected to the signature processing device, including the photodetector signal formation at the first and second position x masks 2. A disadvantage of the known method to the device is that the significant determination of concentration determination when conducting measurements in the atmosphere on long paths is not a problem, since the molecules of the primary and 39S aerosol light scattering in an uncontrolled manner changes the observed optical thickness of the test gas and does not allow the use of laboratory calibration curves. . The purpose of the invention is to expand the range of application by providing concentration measurements on long paths. The goal is achieved by the fact that in the method of measuring the concentration of contaminated gas gases, including obtaining an optical absorption spectrum of a gas and measuring the ratio of the intensity sums in a given number of spectral regions of a given width coinciding with the minimum and maximum of the absorption spectrum, respectively, the ratio of the intensity sums is additionally measured in the corresponding number of spectral regions shifted in one direction by the fractional part of a given width relative to the minthmum and, accordingly, mind, with the same width, add a known gas concentration, measure the intensity ratio ratios at a new gas concentration, and determine the desired gas concentration using the formula. Г R-R UR-R) - (R-R) b is the optical path length in the gas of the desired concentration C; L is the optical path length in a gas of a known concentration C — the first ratio of the sum of intensities in the presence of the desired concentration and, respectively, in the presence of the desired and known concentration; R and R is the second ratio of the intensity amounts in the presence of the desired and, respectively, the desired and known concentration. In addition, in a device for measuring the concentration of pollutant gases. containing an optical radiation source, a spectrometer for decomposing radiation transmitted through a gas into a spectrum, a correlation mask with a slit located in the focal plane of the spectrometer with a slit for sampling the maxima and minima of the intensity of the spectrum at the first and second positions of the mask, respectively, a photodetector connected to the device signal processing 74, which includes the scheme of forming the ratio of the photodetector signals at the first and second positions of the mask, the mask is made with additional slits for Selecting spectral regions shifted relative to the maximum and minimum intensities to the fractional part of the spectral width at the third and fourth positions of the mask, respectively, the photodetector signal processing device contains a second signal ratio formation circuit at the third and fourth positions of the mask and is equipped with a computer system for determining the desired gas concentration, and a cuvette with a gas of known concentration, which is movable, is located at the spectrometer inlet. FIG. 1 schematically shows the proposed device; in fig. 2 is a detailed block diagram of the electronics included in the device; in fig. 3 - transmission spectrum SQj; in fig. 4 (a, S) - transmission spectra in FIG. 5 - An example of a complete sequence of signals at the input of the photodetector. In the diagrams (Figs. 3 and 4), the ordinates refer to the transmission values (T), and the abscissas to the wavelengths (A). FIG. The 5 ordinates relate to the magnitudes of the stresses (V), and the abscissas to the magnitudes of the time. (t). Telescopic system 1 focuses a light beam coming from an optical radiation source, for example from an arc lamp, into a slit 2 provided at the input of spectrometer 3, Spectrometer 3 is a diffraction grating spectrometer. At the inlet of the spectrometer 3, there is a cuvette 4 containing the test gas of known concentration. In the output focal plane 5 of the spectrometer 3, there is a correlation mask 6, which is rotated with the ni power of the engine 7, controlled by the intermediary of electronic equipment 8 (Fig. 2). Electronic control equipment OSU. The mask 6 contains a quartz disk with an opaque surface in terms of radiation, the disk has four rows of photographic images, forming the portions of the concentric portions of the torus located in the form of sectors. These four rows of slots are the same (the same length of the corresponding slots is the same distance between two adjacent slots of each row, the same number of slots), these rows differ only in the distance on which they are located relative to the disk axis, and, consequently, different the position at which the spectrum of the HIGH regions is sampled during the mask rotation. The position of the slits relative to each other and relative to the axis of the disk is 4 functions of the contaminant gas under investigation. If the test gas is, for example, SO, the transmission spectrum of the test gas is limited within the range of wavelengths from 29OO to 315 O A (Fig: 3). In this case, the conclusion about the position of the four rows of slots can be made using FIG. 4 (a, b), where for each row of slits are shown only gris following one after another. In fact, designating four papes of slots -i, j, B and d p-g slots -t (Fig. 4a) coincides with the absorption windows, and a number of slots j coincides with the absorption bands 502. 4 (a, 5) the width of these slots is on the scale of the absorption bands and windows. RANGE of slots & (Fig. 4 6) is shifted by a certain amount towards the ultraviolet, in particular by 2.4 A with respect to the position of the group -. Group d is shifted towards ultraviolet violet by the same value relative to pear j. The rotating mask performs parallel transfer into the focal plane of the spectrometer and accurately centering four slit rows with respect to the windows and bands of the gas absorption spectrum appearing in the output focal plane 5 of the spectrometer 3. The photodetector 10 located behind the rotating mask 6 accepts a dispersed light radiation passing through the marked rows of slits that carry out sampling of spectral regions, and converts the samples into electrical signals 11.1-11.4 (Fig. 5) having a similar duration, ku mask rotates at a constant speed. Since there are four rows of slits, the output of the photodetector 1O will be a periodic sequence of four electrical signals 11.1, 11.2, 11.3 and 11.4, repeated with the rotational speed of the mask 6. Each of these electrical signals refers to a sample made by a corresponding row of slits in a number of spectral regions of the dispersed light beam. An electrical signal 11.1 having an amplitude arises when a row of slots, passing in front of the output focal plane of spectrometer 3, sees windows of the absorption spectrum of the test gas, for example SOj. The tantric signal 11.2 with amplitude V is obtained in the same way, when a series of slits j sees the bands of the designated absorption spectrum. Electrical signal 11.3 with amplitude Y less than amplitude V; it is obtained when a series of slits sees spectral regions shifted by a certain amount in the direction of the ultraviolet relative to the position of the absorption windows of the gas. An electrical signal 11.4 with an amplitude YJ greater than that is obtained, when a number of slits look like the spectral ranges shifted by the same magnitude towards the ultraviolet relative to the absorption bands. The chrome-plated quartz disk, which forms the mask, has, in positions different from the sections related to the four rows of slits, holes, made, like slits, by photographing, and the said holes are detected by three optical interrupters 12-14 The first breaker 12 provides the first electrical signal Y to the programming device 9, this signal Y is the trigger signal of the sequence and the sequence of signals 11.1, 11.2, 11.3 and 11.4. The second breaker 13 provides the second and third electrical signals Vj and Y, which are applied to the programming device 9. These signals are respectively the starting and ending signals of a sequence of four electrical signals 11.1, 11.2, 11.3 and 11.4 at the output of the photodetector 10. The breaker 14 forms a series elec signals (for example, four for each turn of the disk), which are directed to the device 15 for controlling the speed of the engine 7, which rotates the disk forming the correlation mask 6. The preselected phase 16 is located at the output of the photodetector 10, the output electric signals of the preamplifier are sent to the device 17 containing an analog coincidence circuit, turned on by the second electrical signal Yj and turned off by the third electrical signal Yg, and connected to a digital analog converter that converts amplitude values of the electrical signals 11.1, 11.2, 11.3 and 11.4, amplified in preamplifier 16, into the corresponding series of pulses expressed in a binary code. This analog converter is connected to the data addressing unit 18, which has four outputs connected to the same number of digital tweeters 19, 2O, 21 and 22. The programming device 9 controls the unit is so that the series of pulses corresponding to amplified electrical signals 11.1 and 11.2, 11.3 and 11.4 reached digital accumulators 19, 2О, 21 and 22. The number of sequences that will be summed is set to multiples of V (for example, lOVg, lOOY, etc.), which is preselected by the programming device 9. When the number roystvom pospedovatepnostey coincides with the programmed, accumulators 19 and 2O dumped accumulated data generating circuit in the first signal of the photodetector 23, the ratio (r. e. signals 11.1 and 11.2). The ratio forming circuit 23 gives the first value of the ratio R ;. Similar reasoning applies to the second ratio formation circuit 24, giving a second R ratio equal to the ratio between the signals 11.3 and 11.4. The indicated values of R and R are fed to a difference shaping circuit 25, which creates the first difference (R -), the difference is indicated through a switch 26, controlled by a programming device 9, to the first memory U7. The operation of the device for measuring the concentration of pollutant gas from the center will be discussed in detail using the example of determining concentration 502 in a polluted environment. By installing a light source, for example, an iodine lamp or a xenon arc lamp located at a given distance from the device, adjust the mask & so that the row of slits 4 saw the windows, and the row of slits j saw the bands, the indicated alignment was carried out when the signal 11.1 with amplitude reaches the greatest magnitude. These four rows of slits are four rows of slits, j, and (3 sampling the four corresponding spectral regions of the dispersed light beam. After adjusting the mask 6 and presetting a certain number of sequences to be accumulated by the programming device 9, the first measurement, the value of which is equal to the first difference (R - R) I expressed in binary code, is fed to the first memory device 27. This first measurement is carried out without setting the cuvette 4 between the telescopic system 1 and the slit 2. Thus, the light beam emerging from the light source passes only through a random environment that is being examined. As soon as a predetermined number of sequences is reached, the programming device 9 issues a command to the device 28 to install the cuvette 4, having a length LJ and containing 5O2 with a known concentration C; between the light beam leaving the telescopic system slit 2 of the spectrometer 3. Next, a second measurement is taken, at which the first circuit 23 f The arrangement of the ratio gives a third value of R, different from R, since it is obtained when the cuvette 4 is located between the telescopic system 1 and the slit 2 of the spectrometer, and the second diagram 24 of the formation of a ratio gives the fourth value of R, different from R 4, introduced. The third and fourth values of R and R are entered into circuit 25, creating the second difference (R-R). The value (R-) of the designated second measurement is fed through a switch 26, controlled by a programming device 9, to a second storage device 29. The first storage device 27 and the second storage device 29 are connected to the difference circuit 30 to which they supply the stored values data through schema 31 breb995399710
sa memory controlled in turn, where K is a constant, taking into account the programmer 9. The difference ratio circuit 30 gives a value. U-R) (, R-R)) This value, created by the AOR scheme and multiplied by C, C, gives an unknown optical path of 5 O and, accordingly, the concentration of the contaminant gas is & C, L / tR-R) -R) j L UR-R) -tR The differential difference circuit 30 makes it possible to enter the expression C L / L. Therefore, the required concentration C of the contaminant gas is formed at the output of this circuit (average value along the entire length of the path L), the marked value expressed in binary-decimal code is fed to the aphrod indicator 32. It can be shown that the reduced power gives the actual value of the unknown concentration of the contaminating gas, in particular 5 02. The ratio circuit 23 gives the magnitude T of the amplitude of the electrical x sig catch 11.1 and 11.2 respectively. Similarly, the second ratio formation scheme 24 gives “C. . where is7. and 7, - amplitudes of electrical signals 11.3 and 11.4 on the other hand, it is clear that. i-p7. where P and P-2 are the average values of the energies of the light acting on the photodetector and related to the energies of the light signals passing respectively through a series of slits -i and i of the mask. 6, which rotates uniformly. Known equations give R,: N. p .... | i ,,))
权利要求:
Claims (2)
[1]
sand system 1 and spectrometer 3; P is the number of slits applied by the photogravure on the correlation mask 6; M is the average value of the spectral intensity of the source in the position of the slit; gas absorption coefficient (SOj) at the position of the i -th slit; Pj is the average value of the attenuation coefficient due to atmospheric dispersion along the wide gap; , "(., (I-magnitude of the values related to the j-th slit, the spectral intensity of the source, the gas absorption coefficient and the attenuation coefficient due to scattering; C is the unknown concentration of the polluting gas; L is the distance between the light source and the optical measuring device, R., where PO and P are average values of the light energy received by the photodetector and related to the energy of the light signals passing through the rows of slots B and d of the indicated mask respectively. -o6.eCLVexp (, - (i, eL) Ad i) where 5, D and B of this expression have the above values, but all values are taken for a number of slots 6 and q in a position offset by 2.4 A for EOl relative to the values corresponding to the dependence giving R. R. Because, regardless of the magnitude range j avPai RYa.e "Fd values of R and R can be considered as linear functions within certain ranges of the gases being studied, the first approximation gives" l-1x; "- VTTE, where RO and RQ are optical measuring device responses to the left concentration of the gas under investigation the same distance L between the technician and the on-tech meter will measure A CL device, i.e. CL O. Regardless of the atmospheres of adh conditions R - R c. from where () (lk.g, k) .6 (CL,) iCU to A (CU) 4R-R) U (uR-ART A (CL / is given to cell 4, in particular) ,, AR- (R --R and iR k) C, Ui b L (RR) -UTi, the unknown concentration of the contaminant gas is measured precisely because the device is inferential to the source’s xener, to atmospheric scattering and As a source and an optical measuring device. In addition, the designated optical measuring device, in addition to determining the concentration S O, can be used to determine the concentration of various polluting gases, for example K1 O. i. Invention 1. A method for measuring a concentrate of polluted gas gases that absorb optical spectrum, gas and measuring the ratio of intensity sums in a given number of spectral regions of a given width coinciding with the minimum and maximum of the absorption spectrum, respectively, differing from that, in order to broaden the scope of application. by providing concentration measurements on tape tracks, the ratio of the intensity values in the corresponding number of spectral regions is additionally measured, see In the same direction, the fractional part of the set imipHip i is relative to the minimum and, respectively, maximum absorption and having the same width, a known gas concentration is added, 97 the ratios of the intensity amounts are measured at a new gas concentration and the desired gas concentration is determined by the formula C, L, RR L 4R-R) - (RR) -The length of the optical path in the gas of the desired concentration C; - the length of the optical path in the gas of the total concentration - the first ratio of the sums of interactions in the presence of the desired concentration and, accordingly, in the presence of the desired and known concentration; R and R - the second ratio of the sum of intensity in the presence of the desired and, respectively, the desired and known concentration. 2. A device for measuring the concentration of pollutant gases containing an optic radiation source, a spectrometer for the decomposition of transmitted gas radiation into a spectrum located at a high voltage. correlation mask with a slit for sampling MaKctiMyMOB and spectral intensity minima at the first and second masks of the mask, respectively, located behind the mask photodetector connected to the signal processing device, which includes a signal detector of the photodetector at the first 12 second positions masks, that is, so that, in order to expand the field of application, the mask is made with additional slits for sampling spectral regions shifted from THO to a maximally mind and minimum intensity per fractional part of the width of the spectral region at the third and fourth positions of the mask, respectively, the photodetector signal processing device contains a second scheme for forming the ratio of the photodetector signals at the friction and fourth positions of the mask and is equipped with a computerized dps determination system the desired concentration of the gas, and at the spectrometer inlet is a CC with a gas of known concentration, which is movable. Sources of information taken into account in the examination l. Applied infrared spectro-scat. Ed. D. Kendall, M. / Mtf, 1970, p. 250-257.
[2]
2. Patent of Germany No. 1598188, cl. 42 H 20/01, 1967 (prototype).
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FIG. 2
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引用文献:
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US9863756B1|2014-10-07|2018-01-09|Kla-Tencor Corporation|Line scan spectroscopic white light interferometry for semiconductor inspection and metrology|
法律状态:
优先权:
申请号 | 申请日 | 专利标题
IT3431/74A|IT1023570B|1974-07-04|1974-07-04|OPTICAL METER FOR CONCENTRATION OF POLLUTING GAS ON LONG AND SHORT TRAVEL|
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